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Product Details:
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| Pumping Speed: | 1401L/s | Lubrication: | Maglev |
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| Flange: | ISO-F/CF 200 | Cooling: | Water |
| Name: | Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing | Keyword: | Turbo Molecular Pump |
| Highlight: | maglev lubrication molecular vacuum pump,chip manufacturing molecular vacuum pump,maglev lubrication turbo molecular pumps |
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Maglev Pump , CXF-200/1401 , Water cooling , On board
series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.
The advantages:
1. Zero friction during operation, and low power consumption
2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps
3. Capable of extracting corrosive gases for long term
4. High safety and long service life due to protection of bearings with precision ceramic balls
5. power generating function in case of sudden power-off
Specifications:
| Model | CXF-200/1401 |
| Pump Speed(l/s,Air) | 1400 |
| Compression Ratio | >1×107 |
| Ultimate Vacuum(Pa) | ≤2×10-6 |
| Inlet Flange | DN200 ISO K(LF) |
| DN200 ISO F | |
| DN200 ISO CF | |
| Outlet Flange | KF 40 |
| Rotation Speed(rpm) | 33000 |
| Run-up Time(min) | 6 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting or ientation | Any |
| Cooling method | Water |
| Weight(kg)(With Controller) | 51 |
Contact Person: Ms. Wang He
Tel: 86-10- 82548271
Fax: 86-010-62564613
