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-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate

China KYKY TECHNOLOGY CO., LTD. certification
China KYKY TECHNOLOGY CO., LTD. certification
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-5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate


Large Image :  -5KV Triode Sputter Pump Ion Stainless Steel Increasing Inert Gas Pumping Rate

Product Details:
Place of Origin: China
Brand Name: KYKY
Certification: CE
Model Number: 3L-25
Payment & Shipping Terms:
Minimum Order Quantity: 1
Packaging Details: Wooden box for overseas shipment
Delivery Time: 4weeks
Payment Terms: L/C, T/T
Detailed Product Description
Flange: DN100CF Pumping Speed: 21L/s Air
Ultimate Pressure: 7E-8 Working Voltage: -5KV
High Light:

sputter ion pump


varian ion pump

Ion Pump , 3L-25 , DN35CF , 21L/s Air , 6L/s Ar , -5KV , 7E-8Pa

Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.

The sputter-ion pump is main pump of oil less ultra-high vacuum set.

The ion pump works in a closed system which doesn't require continuous working backing pump.



Material of anode is stainless steel barrel, and material of cathode istitanium plate. Penning discharge process ionizes gas under the joint action of magnetic field and electric field, thus realizing exhausting of gas.


Triode ion pump is improved for increasing the pumping rate for inert gas; ions of inert gas are subjected to grazing incidence into titanium grid of cathode, then neutralized, and reflected to pump wall and anode for being buried with the titanium film. As inert gas buried in the pump wall will not be released due to positive ion bombardment, the pumping speed for inert gas is increased.



This series of pump has advantages such as cleanness, high vacuum degree, zero noise, zero vibration and convenience in operation.



Main applications are  the scientific experiment apparatuses in the fields of high-energy particle accelerator, controlled thermonuclear reaction apparatus, electric vacuum device, semiconductor material, electronic microscope and mass spectrometer, and other industrial equipment requiring ultra-high vacuum.



Model 3L-25
Flange DN35CF
Pumping speed(L/S) ( air) 21
Pumping speed (Ar) 6
Start-up pressure (Pa) ≤5×10-4
ultimate pressure (Pa) 7×10-8
(℃)baking temperature   <200
With magnetic
Without magnetic <300
working voltage(KV) -5
electrode unit 1
L*W*H (mm) 222×121×161
(kg) weight 8

Contact Details

Contact Person: sales

Tel: +8613810212935

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