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|Name:||Water Cooling Maglev Lubrication Turbomolecular Pump Ce||Keyword:||Turbomolecular Pump|
maglev lubrication turbomolecular pump,
water cooling turbomolecular pump,
ce turbomolecular vacuum pump
Water Cooling Maglev Lubrication Turbomolecular Pump CE
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
|Inlet Flange||DN200 ISO K(LF)|
|DN200 ISO F|
|DN200 ISO CF|
|Outlet Flange||KF 40|
|Backing Pump (L/s)||15|
|Mounting or ientation||Any|
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
Contact Person: sales