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|Cooling:||Water||Pumping Speed:||2300L/s N2|
turbo molecular pumps,
turbomolecular vacuum pump
Maglev Pump, CXF-250/2301, ISO-K/CF , Water cooling On Board
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force, meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
This Pumps have advantages, such as Zero friction during operation, and low power consumption, Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps, Capable of extracting corrosive gases for long term, High safety and long service life due to protection of bearings with precision ceramic balls and power generating function in case of sudden power-off. It has advatages as free of friction, pollution and maintenance and with low vibration, and can be installed in any orientation.
Extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature in the fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to.
|Inlet Flange||DN250 ISO K(LF)|
|DN250 ISO F|
|DN250 ISO CF|
|Outlet Flange||KF 40|
|Backing Pump (L/s)||15|
|Mounting or ientation||Any|
Contact Person: sales