Oil Lubrication Turbomolecular Vacuum Pump FF-160/620E Simple Maintenance
Turbo Molecular Pump , FF-160/620E , Water cooling , Oil lubrication The oil lubrication turbo pumps are products of compact and high-performance developed by KYKY. The advantages of the oil lubrication turbo pumps are compact structure, convenient operation, flexible installation, wide application ...
turbomolecular vacuum pump
,turbo vacuum pump
Turbo Molecular Pump , FF-160/620E , Water cooling , Oil lubrication
The oil lubrication turbo pumps are products of compact and high-performance developed by KYKY. The advantages of the oil lubrication turbo pumps are compact structure, convenient operation, flexible installation, wide application range and stable performance.
Advantages:
1. Good performance under harsh environmental (high temperature, dust, etc.).
2. Stable performance and long service life
3. Simple maintenance, convenient operation
Applications:
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries.
Specifications:
| Flange(In) | DN160 CF/ISO-K |
| Flange(Out) KF | DN40 |
| Pumping Speed( L/s) | N2:600 |
| He:380 | |
| H2:240 | |
| Ar:580 | |
| Compression Ratio | N2:109 |
| He:105 | |
| H2:104 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-8 |
| ISO-K:6×10-7 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 240 |
| Max. Fore-vacuum Pressure | N2:350 |
| Gas Throughout (sccm) | N2:1200 |
| He:880 | |
| H2:700 | |
| Ar:450 | |
| Rotation Speed ( rpm) | 36000 |
| Run-Up Time(min) | ≤9 |
| Cooling Type,Standard | Air |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | ≤500 |
| Controller Model | TCDP-II with 2.5 metet cable |
| Weight (kgs) | 29(LF) 30.5(CF) |
