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Product Details:
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| Flange: | ISO-K/CF 160 | Cooling: | Air |
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| Lubrication: | Oil | Application: | Coating , CVD , Ion Implantation , Electron Beam Welding |
| High Light: | turbomolecular vacuum pump,turbo vacuum pump |
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Turbo Molecular Pump , FF-160/620E , Water cooling , Oil lubrication
The oil lubrication turbo pumps are products of compact and high-performance developed by KYKY. The advantages of the oil lubrication turbo pumps are compact structure, convenient operation, flexible installation, wide application range and stable performance.
Advantages:
1. Good performance under harsh environmental (high temperature, dust, etc.).
2. Stable performance and long service life
3. Simple maintenance, convenient operation
Applications:
Main applications are in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic components manufacturing, low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnace and other industries.
Specifications:
| Flange(In) | DN160 CF/ISO-K |
| Flange(Out) KF | DN40 |
| Pumping Speed( L/s) | N2:600 |
| He:380 | |
| H2:240 | |
| Ar:580 | |
| Compression Ratio | N2:109 |
| He:105 | |
| H2:104 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-8 |
| ISO-K:6×10-7 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 240 |
| Max. Fore-vacuum Pressure | N2:350 |
| Gas Throughout (sccm) | N2:1200 |
| He:880 | |
| H2:700 | |
| Ar:450 | |
| Rotation Speed ( rpm) | 36000 |
| Run-Up Time(min) | ≤9 |
| Cooling Type,Standard | Air |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | ≤500 |
| Controller Model | TCDP-II with 2.5 metet cable |
| Weight (kgs) | 29(LF) 30.5(CF) |
Contact Person: sales
Tel: +8613810212935
