Corrosion Resisting Turbo Molecular Vacuum Pump Magnetically Levitated
Maglev Pump , CXF-200/1401 , Water cooling , On board The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation. ...
Magnetically Levitated Turbo Molecular Vacuum Pump
,Corrosion Resisting Turbo Molecular Vacuum Pump
Maglev Pump , CXF-200/1401 , Water cooling , On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Specifications:
| Model | CXF-200/1401 |
| Pump Speed(l/s,Air) | 1400 |
| Compression Ratio | >1×107 |
| Ultimate Vacuum(Pa) | ≤2×10-6 |
| Inlet Flange | DN200 ISO K(LF) |
| DN200 ISO F | |
| DN200 ISO CF | |
| Outlet Flange | KF 40 |
| Rotation Speed(rpm) | 33000 |
| Run-up Time(min) | 6 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting or ientation | Any |
| Cooling method | Water |
| Weight(kg)(With Controller) | 51 |
