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Product Details:
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| Pumping Speed: | 1401L/s | Lubrication: | Maglev |
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| Flange: | ISO-F/CF 200 | Cooling: | Water |
| Name: | Corrosion Resisting Turbo Molecular Vacuum Pump Magnetically Levitated | Keyword: | Turbo Molecular Pump |
| Highlight: | corrosion resisting turbo molecular vacuum pump,magnetically levitated turbo molecular vacuum pump,turbomolecular pump magnetically levitated |
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Maglev Pump , CXF-200/1401 , Water cooling , On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Specifications:
| Model | CXF-200/1401 |
| Pump Speed(l/s,Air) | 1400 |
| Compression Ratio | >1×107 |
| Ultimate Vacuum(Pa) | ≤2×10-6 |
| Inlet Flange | DN200 ISO K(LF) |
| DN200 ISO F | |
| DN200 ISO CF | |
| Outlet Flange | KF 40 |
| Rotation Speed(rpm) | 33000 |
| Run-up Time(min) | 6 |
| VIB (mm) | <0.05 |
| Backing Pump (L/s) | 15 |
| Mounting or ientation | Any |
| Cooling method | Water |
| Weight(kg)(With Controller) | 51 |
Contact Person: Ms. Wang He
Tel: 86-10- 82548271
Fax: 86-010-62564613
