Product Details:
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Resolution: | SE 1.5nm@15kV BSE 3nm@30kV | Magnification: | 1x-600000x |
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Accelerating Voltage: | 0.2kV-30kV | Max Specimen Diameter: | 175mm |
Highlight: | scanning electron microscopy instrumentation,sem machine |
Advantages:
◆ Schottky field emission gun
◆ Multi-stage high performance lens system
◆ High beam stability
◆ Customizable extra-large sample chamber
◆ Simple operation
◆ Rich extensibility and high cost performance
Specifications:
Item | EM8010 | |
Resolution |
SE 1.5nm@15kV BSE 3nm@30kV
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Magnification |
1x-600000x
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|
Electron Gun | Schottky Field Emission Gun | |
Accelerating Voltage |
0.2kV-30kV
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|
Vacuum System
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2 Ion Pumps, 1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump
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Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
Specimen Stage | Five axes stage | |
Travel | X(Auto) | 0 ~ 80mm |
Range | Y(Auto) | 0 ~ 50mm |
Z(Manual) | 0 ~ 30mm | |
R(Manual) | 360° | |
T(Manual) | -5° ~ 70° | |
Max Specimen Diameter | 175mm | |
Detector |
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Modification | Stage Upgrade;EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator;SEM+Coating Machine;SEM+Laser | |
Accessories |
EDS/EBSD/STEM/CL/Heating Stage/Cooling Stage / Tensile Stage, etc.
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Contact Person: Ms. Wang He
Tel: 86-10- 82548271
Fax: 86-010-62564613