High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry
High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry
Basic Properties
Country Of Origin
China
Brand Name
KYKY
Certificate
CE
PRODUCT MODEL
FF-160/620N
Trading Properties
MOQ
1
Unit Price
upon request
Payment Method
T/T
Product Summary
Turbo Molecular Pump , FF-160/620N , Anti-corrosion , Pumping 600L/s N2 The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are ...
Product Details
Highlight:
High Temperature Proof Molecular Vacuum Pump
,Ion Implantation Molecular Vacuum Pump
Type:
Anti Corrosive
Flange:
DN160
Pumping Speed:
600L/s
Product Description
Turbo Molecular Pump , FF-160/620N , Anti-corrosion , Pumping 600L/s N2
The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are well suited for applications in corrosive environments.
Advantages:
| 1 | Anti corrosive plating |
| 2 | Stable performance |
| 3 | Long service life |
| Simple maintenance | |
| 4 | Convenient operation |
| 5 | Available for harsh operating environment (high temperature, dust, strong corrosion, etc.) |
Application:
| Industrial leak detection | Low-E glass | Optical coating |
| PVD | ITO glass | Solar cells |
| CVD | Electron beam welding | Vacuum furnaces |
| Ion implantation | vacuum electronic components manufacturing |
Specifications:
| Flange(In) | DN160 CF/ISO-K |
| Flange(Out) KF | DN40 |
| Pumping Speed( L/s) | N2:600 |
| He:380 | |
| H2:240 | |
| Ar:580 | |
| Compression Ratio | N2:109 |
| He:104 | |
| H2:103 | |
| Ar:109 | |
| Ultimated Pressure(Pa) | CF:6×10-7 |
| ISO-K:6×10-6 | |
| Max. Continuous Fore-vacuum pressure(Pa) | 240 |
| Max. Fore-vacuum Pressure | N2:350 |
| Gas Throughout (sccm) | N2:1200 |
| He:880 | |
| H2:700 | |
| Ar:450 | |
| Rotation Speed ( rpm) | 27000 |
| Run-Up Time(min) | ≤7 |
| Cooling Type,Standard | Water |
| Cooling Water Consumption ( L/min) | ≥1 |
| Cooling Water Temperature(℃) | ≤25 |
| Power Connection:Voltage (V AC) | 220±22 |
| Max.Power Consumption (W) | ≤500 |
| Controller Model | TCDP-II with 2.5 metet cable |
