KYKY TECHNOLOGY CO., LTD.

Innovating Scientific Instruments

Developing into First-class Enterprises

Home ProductsTurbomolecular Pump

Maglev Lubrication Turbomolecular Pump ISO-K/CF Low Power Consumption

Certification
China KYKY TECHNOLOGY CO., LTD. certification
China KYKY TECHNOLOGY CO., LTD. certification
I'm Online Chat Now

Maglev Lubrication Turbomolecular Pump ISO-K/CF Low Power Consumption

Maglev Lubrication Turbomolecular Pump ISO-K/CF Low Power Consumption
Maglev Lubrication Turbomolecular Pump ISO-K/CF Low Power Consumption

Large Image :  Maglev Lubrication Turbomolecular Pump ISO-K/CF Low Power Consumption

Product Details:
Place of Origin: China
Brand Name: KYKY
Certification: CE
Model Number: CXF-200/1400E
Payment & Shipping Terms:
Minimum Order Quantity: 1
Price: Upon request
Packaging Details: Wooden box for overseas shipment
Delivery Time: 4weeks
Payment Terms: T/T, L/C
Detailed Product Description
Flange: ISO-K/CF DN200 Cooling: Water
Lubrication: Maglev Pumping Speed: 1400L/s N2
High Light:

turbo molecular pumps

,

turbomolecular vacuum pump

Maglev Pump , CXF-200/1400 , Water Cooling , ISO-K/CF , External controller

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.

Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.

 

Technologies:

  • Control Technology for Magnetic Bearing: a 5-axis magnetically levitated, based on advanced international control theory, to guarantee such significant advantages of the high-speed shafting as stable levitated and reliable operation.
  • Motor Drive Control Technology: High-efficiency high-speed DC motor and servo control system, haveing maximum energy of the motor and to compensate the rotating speed of shafting automatically, thereby realizing stable start-up, reliable operation and automatic regulating function of dynamic energy.
  • Carbon fiber composite rotor technology: Made by compounding high-strength aluminum alloy and light-weight carbon fiber. characterized of great reduction of weight and great improvement of strength, so that targets of high rotating speed, high performance and high reliability are achieved.
  • Corrosion resisting technology: Surfaces of parts in chambers are treated with special process, so that the surfaces can resist corrosion caused by corrosive gases in semiconductor manufacturing processes for a long time. In addition, inert gases such as N2 are fully filled in shafting of the pumps to protect the low vacuum parts in the pumps, so that function of stably exhausting corrosive gases for long periods is realized.
  • Heating temperature control system: equipped with an electric heater and a temperature controller, cooling water, air-bone heating, electric heating and heat carried by protective gases can be monitored and controlled during operation, temperature in the pumps can be maintained at some value for long term, some gaseous substances are not converted into solid substances at normal temperature and not deposited in the pumps, and requirements for special process such of etching can be met.

The advantages:

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

6. Free of friction

7. Free of pollution

8. Free of maintenance

9. Low vibration

10. installed in any orientation.

 

Applications:

 Extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature in fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, .

 

Specifications:

Flange(In) DN200 CF/ISO-K, ISO-F
Flange(Out) KF DN40
Pumping Speed( L/s) N2:1400
Ar:1360
He:880
H2:560
Compression Ratio N2:108
Ar:108
He:104
H2:103
Ultimated Pressure(Pa) CF:1×10-6
ISO-K/F:6×10-6
Max. Continuous Fore-vacuum pressure(Pa) 100
Max. Fore-vacuum Pressure N2:210
Gas Throughout (sccm) N2:2700
Ar:980
He:2000
H2:1800
Rotation Speed ( rpm) 30000
Run-Up Time(min) ≤8
Cooling Type,Standard Water
Cooling Water Consumption ( L/min) 1
Cooling Water Temperature(℃) 20
Power Connection:Voltage (V AC) 220
Controller Model CXF-1400
Weight (kgs) 50(ISO-K/F) 52(CF)

Contact Details
KYKY TECHNOLOGY CO., LTD.

Contact Person: sales

Tel: +8613810212935

Send your inquiry directly to us (0 / 3000)