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High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry

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High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry

High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry
High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry

Large Image :  High Temperature - Proof Molecular Vacuum Pump For Ion Implantation Industry

Product Details:
Place of Origin: China
Brand Name: KYKY
Certification: CE
Model Number: FF-160/620N
Payment & Shipping Terms:
Minimum Order Quantity: 1
Price: upon request
Packaging Details: wooden box available for exporting shipment
Delivery Time: 5-8weeks
Payment Terms: T/T
Detailed Product Description
Type: Anti Corrosive Flange: DN160
Pumping Speed: 600L/s
High Light:

turbo molecular pumps

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turbo vacuum pump

Turbo Molecular Pump , FF-160/620N , Anti-corrosion , Pumping 600L/s N2

The N-series turbo pumps are innovated on the basis of the conventional turbo pump. The main improvement is the nickel plating of the core components and the installation of the purging device, which make the N-series pumps are well suited for applications in corrosive environments.

 

Advantages:

1 Anti corrosive plating
2 Stable performance
3 Long service life
  Simple maintenance
4 Convenient operation
5 Available for harsh operating environment (high temperature, dust, strong corrosion, etc.)

 

Application:

Industrial leak detection Low-E glass Optical coating
PVD ITO glass Solar cells
CVD Electron beam welding Vacuum furnaces
Ion implantation vacuum electronic components manufacturing  

 

Specifications:

Flange(In) DN160 CF/ISO-K
Flange(Out) KF DN40
Pumping Speed( L/s) N2:600
He:380
H2:240
Ar:580
Compression Ratio N2:109
He:104
H2:103
Ar:109
Ultimated Pressure(Pa) CF:6×10-7
ISO-K:6×10-6
Max. Continuous Fore-vacuum pressure(Pa) 240
Max. Fore-vacuum Pressure N2:350
Gas Throughout (sccm) N2:1200
He:880
H2:700
Ar:450
Rotation Speed ( rpm) 27000
Run-Up Time(min) ≤7
Cooling Type,Standard Water
Cooling Water Consumption ( L/min) ≥1
Cooling Water Temperature(℃) ≤25
Power Connection:Voltage (V AC) 220±22
Max.Power Consumption (W) ≤500
Controller Model TCDP-II
with 2.5 metet cable

Contact Details
KYKY TECHNOLOGY CO., LTD.

Contact Person: sales

Tel: +8613810212935

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