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Oil Less -5KV Ion Vacuum Pump 55L/S Air 12L/S Ar High Vacuum Degree

China KYKY TECHNOLOGY CO., LTD. certification
China KYKY TECHNOLOGY CO., LTD. certification
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Oil Less -5KV Ion Vacuum Pump 55L/S Air 12L/S Ar High Vacuum Degree


Large Image :  Oil Less -5KV Ion Vacuum Pump 55L/S Air 12L/S Ar High Vacuum Degree

Product Details:
Place of Origin: China
Brand Name: KYKY
Certification: CE
Model Number: 3L-50
Payment & Shipping Terms:
Minimum Order Quantity: 1
Packaging Details: Wooden box for overseas shipment
Delivery Time: 4weeks
Payment Terms: L/C, T/T
Detailed Product Description
Flange: DN100CF Pumping Speed: 55L/s Air
Ultimate Pressure: 7E-8 Pa Voltage: -5KV
High Light:

varian ion pump


starcell ion pump

Ion Pump , 3L-50 , DN100CF , 55L/s Air , 12L/s Ar , -5KV

Sputter-ion pump is vacuum generation equipment for obtaining clean and ultra-high vacuum.

The sputter-ion pump is main pump of oil less ultra-high vacuum set.

The ion pump works in a closed system which doesn't require continuous working backing pump.



Material of anode is stainless steel barrel, and material of cathode istitanium plate. Penning discharge process ionizes gas under the joint action of magnetic field and electric field, thus realizing exhausting of gas. 


Triode ion pump is improved for increasing the pumping rate for inert gas; ions of inert gas are subjected to grazing incidence into titanium grid of cathode, then neutralized, and reflected to pump wall and anode for being buried with the titanium film. As inert gas buried in the pump wall will not be released due to positive ion bombardment, the pumping speed for inert gas is increased.


1. High vacuum degree

2. Zero vibration

3. Zero noise

4. Cleanness

5. Convenient to operate



It can be applied to scientific experiment apparatuses such as high-energy particle accelerator, controlled thermonuclear reaction apparatus, electric vacuum device, semiconductor material, electronic microscope and mass spectrometer, and other industrial equipment requiring ultra-high vacuum.



Model 3L-50
Flange DN100CF
Pumping speed(L/S) ( air) 55
Pumping speed (Ar) 12
Start-up pressure (Pa) ≤5×10-4
ultimate pressure (Pa) 7×10-8
(℃)baking temperature   <200
With magnetic
Without magnetic <300
working voltage(KV) -5
electrode unit 2
dimension(mm) 90×90(4-M6)
L*W*H (mm) 290×120×299
(kg) weight 22

Contact Details

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Tel: +8613810212935

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