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|Controller:||On Board||Ultimate Pressure:||CF:1E-6, ISO-K/F:6E-6|
turbo molecular pumps,
turbomolecular vacuum pump
Maglev Pump , CXF-250/2301E , Water cooling , On board
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
|Flange(In)||DN250 CF/ISO-K, ISO-F|
|Pumping Speed( L/s)||N2:2300|
|Max. Continuous Fore-vacuum pressure(Pa)||60|
|Max. Fore-vacuum Pressure||N2:250|
|Gas Throughout (sccm)||N2:3600|
|Rotation Speed ( rpm)||27000|
|Cooling Water Consumption ( L/min)||1|
|Cooling Water Temperature(℃)||20|
|Power Connection:Voltage (V AC)||220|
Contact Person: sales