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Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

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Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

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Large Image :  Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing

Product Details:
Place of Origin: China
Brand Name: KYKY
Certification: CE
Model Number: CXF-200/1401E
Payment & Shipping Terms:
Minimum Order Quantity: 1
Packaging Details: Wooden box for overseas shipment
Delivery Time: 4weeks
Payment Terms: T/T, L/C
Detailed Product Description
Pumping Speed: 1401L/s Lubrication: Maglev
Flange: ISO-F/CF 200 Cooling: Water
Name: Maglev Lubrication Molecular Vacuum Pump For Chip Manufacturing Keyword: Turbo Molecular Pump
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Maglev Pump , CXF-200/1401 , Water cooling , On board

 

 

series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, cvd, pvd and ion implantation and gases easily coagulated at normal temperature.

 

 

The advantages:

 

 

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

 

Specifications:

Model CXF-200/1401
Pump Speed(l/s,Air) 1400
Compression Ratio >1×107
Ultimate Vacuum(Pa) ≤2×10-6
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed(rpm) 33000
Run-up Time(min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting or ientation Any
Cooling method Water
Weight(kg)(With Controller) 51

Contact Details
KYKY TECHNOLOGY CO., LTD.

Contact Person: sales

Tel: +8613810212935

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